Microelectronics and Semiconductor Core Facilities and Resources
Core Research Facilities
The Notre Dame Nanofabrication Facility (NDNF) is a 9,000-square-foot teaching and research cleanroom that houses a wide array of tools for material and device processing. The NDNF provides a comprehensive suite of state-of-the-art equipment for designing and manufacturing integrated circuits and devices with geometries of a few nanometers. NDNF researchers explore a wide range of materials and processes, including silicon-related electronic devices, compound semiconductors, zinc selenide nanowires, carbon nanotubes, graphene, and organic polymer-based materials. In addition, the NDNF facilitates the study of microfluidic technologies and microelectromechanical device fabrication.
The Wideband Test Facility consists of load pull wideband testing capabilities and wideband antenna measurements both up to 220 GHz. Testing capabilities include on-wafer linear network analysis from DC through 220 GHz and passive and hybrid-active load-pull for large-signal device characterization and modeling covering Ka-band (18-40 GHz) and W-band (94 GHz), as well as intermodulation measurements and full noise characterization through these
same bands.
The wideband antenna measurement lab can cover frequencies from 4 to 220 GHz with a spherical near- field antenna range with probes and gain standards for C-, X-, Ku/K/Ka-, V-, W-, D-, and G- bands. There is an anechoic chamber with reconfigurable wall sections. Both frequency domain and time domain measurements can be performed.
The Notre Dame Integrated Imaging Facility (NDIIF) provides an integrated suite of sophisticated microscopes and imaging stations that enable expert users to address the most complex modern research problems. The NDIIF’s Electron Microscopy Core integrates a unique bundle of state-of-the-art FEI instrumentation, including a Magellan 400 field emission scanning electron microscope, Helios G4 Ux DualBeam, and Spectra 300 scanning transmission electron microscope.
The Notre Dame Engineering Innovation Hub (EIH) is a 10,000-square-foot facility in the heart of Notre Dame's campus that offers a state-of-the-art experiential learning and advanced manufacturing environment with first-rate resources for collaboration, fabrication, automation, robotics, and modeling. The EIH combines dedicated collaboration space with leading-edge technology and expertise, including advanced manufacturing; additive manufacturing (3D printing); metrology and computing resources; and fabrication and machining technology. The EIH serves as a regional resource to develop innovative product solutions for established companies and new start-ups.
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